首頁 產品零件 LAM / (NVLS) 條列顯示 | 圖片顯示 資料載入中，請稍後...... 713-028553-102 RING CONFINEMNT 713-028553-102 713-028487-003 CONFINEMENT RING 713-028487-003 713-028487-001 CONFINEMENT RING 713-028487-001 22-312771-00 SEAL LIP APC 1MM FLAT 22-312771-00 22-117504-00 SEAL,WAFER,296MM 22-117504-00 17-413579-00 Plate, Charge, Ti 17-413579-00 16-385621-00 PROBE,POT,IRISCELL 16-385621-00 15-372361-00 Gasket,SAC,Membrane,Seal,Iriscell 15-372361-00 15-119067-00 MODIFIED CUP, END EFFECTOR 15-119067-00 15-112705-00 Holder Cap Retainer 15-112705-00 15-01102-00 HUB,EXCLUSION RING 15-01102-00 15-01101-00 HUB,INDEXER 15-01101-00 15-00975-00 Lift Pin, Load Station 4.47" 15-00975-00 15-00921-00 BUSHING, UPPER, EXCL OPTION 15-00921-00 04-417024-00 KIT,PEM CHUCK,BUTTON AND HOLDERS,SBR-XT 04-417024-00 02-347254-01 ASSY,PROBE,POTENTIOSTATIC,CELL1 02-347254-01 15-112704-00 HOLDER,LIFT PIN 15-112704-00 HOLDER,LIFT PIN 853-169443-001 CA,ASSY,SNSR,DISSOLVED O2,DEGASSER,CELL1 853-169443-001 799-165560-001 SPARE,CAP REPLACEMENT KIT,O2 SNSR 799-165560-001 771-297226-007 FLOW SWITCH ASSY 771-297226-007 771-297226-006 FLOW SWITCH ASSY 771-297226-006 771-297226-004 FLOW SWITCH ASSY 771-297226-004 771-297226-001 FLOW Switch ASSY 771-297226-001 714-214686-001 SPRING,SNUBBER,PINNED,CUP,XT 714-214686-001 62-307712-01 FLOW SWITCH ASSY 62-307712-01 61-370044-03 FLOW SWITCH ASSY 61-370044-03 61-370039-03 FLOW SWITCH ASSY 61-370039-03 61-370039-02 FLOW SENSOR 61-370039-02 61-327809-00 FLOW SWITCH ASSY 61-327809-00 34-384779-00 SENSOR,PROXIMITY/REFLEX,NPN,30VDC,4PIN M 34-384779-00 34-336495-01 SENSOR, FLOW, 0.5-5 LPM, SAC, CELL 34-336495-01 34-291574-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR 34-291574-00 34-291573-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR 34-291573-00 34-291572-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR 34-291572-00 22-305161-00 SEAL,WAFER,1.75MM EE APC,300MM 22-305161-00 22-138707-00 FILTER,1.5 MICRON,1/4 FLARE 22-138707-00 20-135632-00 AIR CYL,DBL-ACTG 4"STROKE,3/4" 20-135632-00 17-115725-00 SNUBBER WAFER 17-115725-00 15-428049-00 MEMBRANE,CATIONIC,EB,3D 15-428049-00 15-412730-00 SNUBBER_300MM-APC 15-412730-00 15-406361-00 MEMBRANE,PES,NI,SBR-3D 15-406361-00 15-395485-00 MEMBRANE,PES,IA,SBR-3D_For Snag 15-395485-00 15-385111-00 MEMBRANE,CATIONIC,SAC,EXTREMECELL 15-385111-00 15-375743-00 MEMBRANE,PLATING CELL,SAC 15-375743-00 15-374450-00 MEMBRANE,CATIONIC,SAC,IRISCELL 15-374450-00 15-365387-00 SNUBBER WAFER 15-365387-00 15-327152-00 CUP,VACUUM,300MM 15-327152-00 15-302588-00 MEMBRANE,CATIONIC,SAC,EXTREME,NEXTCELL 15-302588-00 15-302578-00 SNUBBER WAFER 15-302578-00 15-173189-00 CUP,VAC,300MM ANNEAL, VESPEL 15-173189-00 02-142640-00 ASSY,FLOW SNSR, 12ML, EBR, FSA 02-142640-00 02-142639-00 ASSY, FLOW SNSR, 12ML, EBR, BSE 02-142639-00 02-142638-00 ASSY, FLOW SNSR, 50ML, EBR, BSE 02-142638-00 02-117255-00 ASSY, PS FLOW METER 02-117255-00 15-00043-02 ADJUSTER,CERAMIC GAS PLATE 15-00043-02 15-00477-00 PLATE, BOTTOM, 1.25THK. 15-00477-00 15-00484-00 RING,HTR CENTERING,CERAMIC 15-00484-00 15-00485-00 BRKT, 150MM 15-00485-00 15-00558-01 SHIELD,HTR STRAP 2.00 LG 15-00558-01 15-00567-00 CERAMIC,TC 15-00567-00 15-00578-00 CAP,CERAMIC FEEDTHRU 15-00578-00 15-00680-00 SLEEVE CERMIC 15-00680-00 15-00699-01 FORK,FINGER,150mm 15-00699-01 15-00700-00 PLATE, FORK BOTTOM 200MM WAFER 15-00700-00 15-00731-00 BUSHING, KEYED 15-00731-00 15-00742-00 TUBE,TC,CERAMIC 15-00742-00 15-032185-01 PIN WAFER CENTERING 15-032185-01 15-033947-00 COVER, PLATE, 200MM, SEMI, SPEED 15-033947-00 15-052619-00 TONG,RING LIFE 200 MM 15-052619-00 15-053394-01 MINIMUM CONTACT AREA FORK 6" 15-053394-01 15-053394-02 MINIMUM CONTACT AREA FORK 8" 15-053394-02 15-054434-01 Excl RING MOER, 3mm edge exclusi 15-054434-01 15-10324-00 BUTTON, PIN 15-10324-00 15-110411-00 WINDOW,SAPPHIRE 15-110411-00 15-127251-01 COVER PLATE 15-127251-01 15-169372-00 INSERT PADDLE 300MM VESPEL 15-169372-00 15-267616-00 CUP,TOP,KNIFE EDGE,TAPERED,300 15-267616-00 15-269129-00 CUP,300MM,KNIFE EDGE,BOTTOM,X40 15-269129-00 15-282814-00 CUP,TOP,1MM EE 15-282814-00 15-357896-00 CUP,BOTTOM,APC,1.75MM,PAI 15-357896-00 15-357957-00 CUP,BOTTON,APC,1MM,PAI 15-357957-00 16-00123-00 BELLOWS, WELDMENT 16-00123-00 16-286986-00 BELLOWS 16-286986-00 27-10127-00 GATE, VAT 1.21 W/PERFL-E 27-10127-00 60-10312-00 GATE, VAT INSERT CASS W/ PERFL 60-10312-00 839-031766-001 VCR BELLOWS 839-031766-001 839-012255-001 INNER GATE BELLOWS 839-012255-001 796-010692-002 BELLOWS 796-010692-002 790-008220-001 GATE DOOR 790-008220-001 716-801667-005 WINDOW QTZ 716-801667-005 716-443234-002 RING FOCUS QTZ HP PLUS 716-443234-002 716-330891-002 TCP Quartz Window 716-330891-002 716-330504-064 FOCUS RING 716-330504-064 716-038612-003 LAM PIN, PICK UP, DC BIAS 716-038612-003 716-031453-002 RING , FLR CHAMBER , ESC 716-031453-002 716-030136-001 RING,FOC,6" ESC(EDGE RING) 716-030136-001 716-030135-001 EDGE RING 716-030135-001 716-028722-161 BOTTOM CERAMIC CLAMP 716-028722-161 716-028688-268 CLAMP RING 716-028688-268 716-028668-264 PLT, WFR CLMP, DOM SHDW 716-028668-264 716-028414-018 FOCUS RING 716-028414-018 716-028414-016 FOCUS RING 716-028414-016 716-028251-161 CLAMP WAFER, Ceramic 716-028251-161 716-028028-004 RING ELECTRODE CLAMP 6" 12BOL 716-028028-004 716-027740-808 Quartz LSR Window 716-027740-808 716-027740-001 WDO，QTZ 716-027740-001 716-022030-004 SLV,QTZ,STEPPED,PIN,DC BIAS 716-022030-004 716-018614-081 FOCUS RING 716-018614-081 716-012639-024NOZ,INJ,8X .055-45DEG RDL 716-012639-024 716-011923-001 CLAMP WAFER PLATE ATTACHMENT 716-011923-001 716-011564-001 ELECTRODE, UPPER, GRAPHITE, 6", LAM1,2 716-011564-001 716-011563-261 PLATE, WAFER CLAMP 716-011563-261 716-011540-001 RING FACE UPPER ELECTRODE 716-011540-001 716-011057-002 RING FILLER UPPER 716-011057-002 716-011009-001 WINDOW 716-011009-001 716-006721-001 RING,INSULATOR 716-006721-001 715-330984-001 RING GAS 9400 715-330984-001 715-270588-002 SHOEWER HEAD 715-270588-002 715-028532-002 Ring,Cooling,8'Electro-static 715-028532-002 715-018991-206 Electrode,Aluminum.Anode 6" 715-018991-206 715-011985-006 CAP LOWER 715-011985-006 715-011913-080 LOWER BAFFLE 715-011913-080 715-011639-006 Cap, Electrode,thin edge semi 6" 715-011639-006 715-011531-015 UPPER ELECTRODE,ALUMINUM 715-011531-015 715-011148-002 ARM,CHAIN TENSIONER 715-011148-002 715-008220-105 DR,PLASMA,BARRIER,BMPR,ROOKER V,PM 715-008220-105 713-238718-002 Nozzle Tip,EBR,HD,PEM 713-238718-002 713-034965-001 PAD 713-034965-001 03-10411-00 SPRING T/C 03-10411-00 02-120403-00 THERMOCOUPLE SPRING LOADED 300MM 02-120403-00
