61-370044-01 FLOW SWITCH ASSY
61-370044-01
FLOW SWITCH ASSY
61-327620-00 FLOW SWITCH ASSY
61-327620-00
FLOW SWITCH ASSY
715-011622-101 LFTR,WFR 4-PIN FLEX
715-011622-101
LFTR,WFR 4-PIN FLEX
15-032631-00 FLANGE, KEYED SPINDLE ASSY
15-032631-00
FLANGE, KEYED SPINDLE ASSY
0200-07761 PIN ANTENNA POLI SI 300MM
0200-07761
PIN ANTENNA POLI SI 300MM
716-020905-001 RING,FILLER LWR WFR CLAP
716-020905-001
RING,FILLER LWR WFR CLAP
716-460875-002 INSUL, LWR ELCTD, STP CHAMBER
716-460875-002
INSUL, LWR ELCTD, STP CHAMBER
716-330892-007 GDP,PL,SH HD,CER,21 HOLE,9600PTX
716-330892-007
GDP,PL,SH HD,CER,21 HOLE,9600PTX
0200-00435 TOP RING, 150MM
0200-00435
TOP RING,150MM
0200-39142 RING FOCUS 145MM
0200-39142
RING FOCUS 145MM
716-011570-001 ORIFICE FILLER W/C CERAMIC
716-011570-001
ORIFICE FILLER W/C CERAMIC
0200-00466 HOUSING, DBLE RF CONN, REV 5.0 VECTRA IM
0200-00466
HOUSING, DBLE RF CONN, REV 5.0 VECTRA IM
0200-09035 PIN WAFER LIFT 6"
0200-09035
PIN WAFER LIFT 6"
15-147608-00 E-PEC
15-147608-00 E-PEC
716-330045-004 R,EDGE 8" NCH,SHDW R,ESC
716-330045-004
R,EDGE 8" NCH,SHDW R,ESC
1810-329156-11 RING, INNER FOCUS 8' SCCM
1810-329156-11 RING, INNER FOCUS 8' SCCM
716-330121-001 UPPER SHAPED WINDOW
716-330121-001 UPPER SHAPED WINDOW
0200-00968 ISOLATOR, FSG-TEOS, PRODUCER 200MM
0200-00968
ISOLATOR, FSG-TEOS, PRODUCER 200MM
15-293564-00 BLADE, LOAD/UNLOAD, MCA
15-293564-00
BLADE, LOAD/UNLOAD, MCA
771-297226-010 FLOW SWITCH ASSY
771-297226-010
FLOW SWITCH ASSY
02-307391-00 G10 Dome 8" Standard
02-307391-00
8" Standard G10 Dome
1810-328123-11 LIFT BELLOWS
1810-328123-11
LIFT BELLOWS
839-250568-001 BELLOWS
839-250568-001 BELLOWS
839-330743-002 LAM BSR BELLOWS
839-330743-002
LAM BSR BELLOWS
0040-41710 SLIT VALVE BELLOWS
0040-41710
SLIT VALVE BELLOWS
0040-39926 LOWER BELLOWS
0040-39926
LOWER BELLOWS
0040-00890 SLIT VALVE BELLOWS
0040-00890
SLIT VALVE BELLOWS
0040-20023 SLIP DOOR BELLOWS
0040-20023
SLIP DOOR BELLOWS
0040-09193 SLD BELLOWS
0040-09193
SLD BELLOWS
0015-01567 LIFT BELLOWS ASSY
0015-01567
LIFT BELLOWS ASSY
81063-R1 GATE VALVE
81063-R1
GATE VALVE
60-121857-00 GATE ALUMINIUM
60-121857-00
GATE ALUMINIUM
60-119965-00 GATE,50MM X 336MM
60-119965-00
GATE,50MM X 336MM
3870-04001 Slit Valve Door
3870-04001
Slit Valve Door
1D10-303124-21 DEPO RING
1D10-303124-21 DEPO RING
0190-02853 GATE, P5000 ZA MK-II SLIT VALVE
0190-02853
GATE, P5000 ZA MK-II SLIT VALVE
0040-84391 DOOR SPD SLIT VALVE VITON PROCESS 300MM
0040-84391
DOOR SPD SLIT VALVE VITON PROCESS 300MM
0040-84390 DOOR SPD SLIT VALVE VITON LLK 300MM
0040-84390
DOOR SPD SLIT VALVE VITON LLK 300MM
0040-81425 300mm Slit Valve Door
0040-81425
300mm Slit Valve Door
0040-09931 BELLOWS ASSY
0040-09931
BELLOWS ASSY
0150-01567 LIFT BELLOWS ASSY
0150-01567
LIFT BELLOWS ASSY
0040-38826 DXZ CHAMBER LIFTER LOWER BELLOWS
0040-38826
DXZ CHAMBER LIFTER LOWER BELLOWS
0040-38825 DXZ CHAMBER LIFTER UPPER BELLOWS
0040-38825
DXZ CHAMBER LIFTER UPPER BELLOWS
0040-20146 OTIENTAL BELLOWS
0040-20146
OTIENTAL BELLOWS
0040-20155 WELDED BELLOWS WAFER LIFTER
0040-20155
WELDED BELLOWS WAFER LIFTER
0040-96829 EXTRACTION SHAFT BELLOWS
0040-96829
EXTRACTION SHAFT BELLOWS
0040-66385 WELDMENT BELLOWS
0040-66385
WELDMENT BELLOWS
0040-99720 INDEXER SHIELDLE BELLOWS
0040-99720
INDEXER SHIELDLE BELLOWS
0040-13150 200MM MCA HEATER BELLOWS
0040-13150
200MM MCA HEATER BELLOWS
0040-81998 BELLOWS
0040-81998 BELLOWS
0040-73593 SLIT VALVE BELLOWS
0040-73593
SLIT VALVE BELLOWS
0040-73540 PROCESS CHAMBER BELLOWS
0040-73540
PROCESS CHAMBER BELLOWS
0040-71193 BELLOWS
0040-71193 BELLOWS
0040-73311 SLIT VALVE BELLOWS
0040-73311 SLIT VALVE BELLOWS
0040-87358 SLD BELLOWS
0040-87358
SLD BELLOWS
0040-18078 BELLOWS
0040-18078 BELLOWS
0040-32133 LIFT PIN BELLOWS
0040-32133
LIFT PIN BELLOWS
0040-70291 BELLOWS
0040-70291 BELLOWS
0040-93365 BELLOWS ASSY
0040-93365
BELLOWS ASSY
0040-76767 BELLOWS
0040-76767 BELLOWS
0040-74932 BELLOWS
0040-74932 BELLOWS
0040-74480 BELLOWS
0040-74480 BELLOWS
0040-70181 BELLOWS
0040-70181 BELLOWS
0040-62987 BELLOWS
0040-62987 BELLOWS
0040-61276 WAFER LIFT BELLOWS
0040-61276
WAFER LIFT BELLOWS
0040-39946 BELLOWS FINGER PRODUCER CVD
0040-39946
BELLOWS FINGER PRODUCER CVD
0040-38625 HEATER LOFT BELLOWS
0040-38625
HEATER LOFT BELLOWS
0040-36300 WELDMENT BELLOWS ASSY UPPER
0040-36300
WELDMENT BELLOWS ASSY UPPER
0040-20194 COVERAGE BELLOWS
0040-20194
COVERAGE BELLOWS
0040-36299 WELDMENT BELLOWS ASSY LOWER
0040-36299
WELDMENT BELLOWS ASSY LOWER
0040-36095 BELLOWS HEATER LIFT
0040-36095
BELLOWS HEATER LIFT
0040-36033 WELDMENT BELLOWS
0040-36033
WELDMENT BELLOWS
0040-35909 LOWER BELLOWS
0040-35909
LOWER BELLOWS
0040-35553 200MM WAFER LIFT PIN BELLOWS
0040-35553
200MM WAFER LIFT PIN BELLOWS
0040-32204 WELDMENT BELLOWS
0040-32204
WELDMENT BELLOWS
0040-32053 WELDMENT, BELLOWS, WAFER LIFT
0040-32053
WELDMENT, BELLOWS, WAFER LIFT
0040-32052 WELDMENT BELLOWS CATHODE
0040-32052
WELDMENT BELLOWS CATHODE
0040-31998 UPPER BELLOWS
0040-31998
UPPER BELLOWS
0040-23680 300MM HEATER BELLOWS
0040-23680
300MM HEATER BELLOWS
0040-20068 BELLOWS,LIFTER
0040-20068
BELLOWS,LIFTER
0040-09944 GAS LINE W/FLAT WXZ
0040-09944
GAS LINE W/FLAT WXZ
0040-09700 LOWER BELLOWS ASSY
0040-09700
LOWER BELLOWS ASSY
0040-09697 UPPER BELLOWS ASSY
0040-09697
UPPER BELLOWS ASSY
0040-09004 BELLOWS WELDMENT
0040-09004
BELLOWS WELDMENT
0040-08156 SLIT VALVE BELLOWS
0040-08156
SLIT VALVE BELLOWS
0020-22910 ORIENTER BELLOWS
0020-22910
ORIENTER BELLOWS
0040-01362 HEATER LIFTER BELLOWS
0040-01362
HEATER LIFTER BELLOWS
0040-87020 BELLOWS,ASSY
0040-87020
BELLOWS,ASSY
0040-87019 BELLOWS,ASSY
0040-87019
BELLOWS,ASSY
22-117504-00 SEAL,WAFER,296MM
22-117504-00
SEAL,WAFER,296MM
713-020911-102 PLUNGER WAFER CLAMP
713-020911-102 PLUNGER WAFER CLAMP
713-028487-003 CONFINEMENT RING
713-028487-003
713-028553-102 RING CONFINEMNT
713-028553-102
15-00975-00 Lift Pin, Load Station 4.47"
15-00975-00
15-01101-00 HUB,INDEXER
15-01101-00
15-01102-00 HUB,EXCLUSION RING
15-01102-00
15-112705-00 Holder Cap Retainer
15-112705-00
15-119067-00 MODIFIED CUP, END EFFECTOR
15-119067-00
15-372361-00 Gasket,SAC,Membrane,Seal,Iriscell
15-372361-00
16-385621-00 PROBE,POT,IRISCELL
16-385621-00
17-413579-00 Plate, Charge, Ti
17-413579-00
713-028487-001 CONFINEMENT RING
713-028487-001
0020-03672 CLAMP RING 6"
0020-03672
0020-30427 CLAMP 8,EXT CATH,DC
0020-30427
0020-31064 HOLDER, PIN, HDP-CVD
0020-31064
0020-31659 COVER SCREW, VESPEL
0020-31659
0020-34118 CLAMP, VESPEL OX/MLR/NIT SCORE
0020-34118
02-347254-01 ASSY,PROBE,POTENTIOSTATIC,CELL1
02-347254-01
04-417024-00 KIT,PEM CHUCK,BUTTON AND HOLDERS,SBR-XT
04-417024-00
15-00921-00 BUSHING, UPPER, EXCL OPTION
15-00921-00
15-112704-00 HOLDER,LIFT PIN
15-112704-00
HOLDER,LIFT PIN
26-82246-00 SPACER
26-82246-00 SPACER
20-00214-00 Spring, Bearing , Preload
20-00214-00
201-017 BEARING
201-017
19-00149-00 GEAR
19-00149-00
22-00744-00 VALVE DIA 1/8" VCR LIQUID
22-00744-00
22-00302-00 COUPLING
22-00302-00
22-046263-00 COUPLING 1/4 BERG
22-046263-00
22-10064-00 BEARING
22-10064-00
22-118218-00 BEARING BALL,DEEP,GROOVE
22-118218-00
20-00259-00 Wave Spring
20-00259-00
20-00258-00 Wave Spring
20-00258-00
19-00064-00 BRG Bearing
19-00064-00
20-00070-00 RING, RETAINING EXT. 1/2"
20-00070-00
19-034573-03 BEARING.BALL.50 IDX.875
19-034573-03
34-00010-01 FEEDTHRU.ELECTRICAL.19PIN.VAC
34-00010-01
34-00022-00 Relay,S/S,25A
34-00022-00
34-00056-00 Switch,Interlock
34-00056-00
34-10095-00 Relay,SSR 240V 25A
34-10095-00
22-110586-00 SEAL,BONNET,VAT,200MM
22-110586-00
22-00417-00 GASKET,VCR NICKEL RET
22-00417-00
22-101315-00 Shaft, Spacer
22-101315-00
22-00683-00 T-SEAL, 15/16ID CHEMTEMP
22-00683-00
22-00132-00 Collar,Setscrew,1/4
22-00132-00
22-00357-00 COUPLING,PANEL Mt.1/8" FLOW,10-32
22-00357-00
39-732-001 COLLAR PIN
39-732-001
676-000504-003 MOTOR 12VDC
676-000504-003
69-337513-00 GREASE,NYETORR 5300,10CC SRNG
69-337513-00
26-81433-00 SHIELD CAP STRAP
26-81433-00
3080-01041 BELT TMG .080P
3080-01041
31-00293-00 AMPLIFIER,BANNER
31-00293-00
34-00102-00 SWITCH, OVERTRAVEL PLUNGER
34-00102-00
27-00079-00 THERMOCOUPLE TYPE
27-00079-00
27-229907-00 TC GAUGE
27-229907-00
3310-01055 Convectron Gauge
3310-01055
746-007700-001 BEARING. RADIAL BALL. 375 BORE
746-007700-001
770-007575-001 CYLINDER,MINI-PANCAKE 1/2" BORE
770-007575-001
715-011148-002 ARM,CHAIN TENSIONER
715-011148-002
768-090914-001 SWITCH,VACUUM
768-090914-001
80-195-119 FITTING , VCR
80-195-119
80-871-146 SCABLE MTCH NTWK 903
80-871-146
40-297-001 PIN,QUARTZ, 901E
40-297-001
36-00012-00 FUSE, 40A FAST ACTING
36-00012-00
40-297-002 QUARTZ PIN
40-297-002
39-70466-00 PLUG,NEMA5-15P,15A,125V,RT ANG
39-70466-00
56-100217-00 Lamp Quartz UV Spectrometer Halogen V
56-100217-00
60-00183-00 Flow Contro, Elbow
60-00183-00
713-012546-001 HOSE COILED
713-012546-001
34-291573-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
34-291573-00
34-291574-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
34-291574-00
34-384779-00 SENSOR,PROXIMITY/REFLEX,NPN,30VDC,4PIN M
34-384779-00
61-327809-00 FLOW SWITCH ASSY
61-327809-00
61-370039-02 FLOW SENSOR
61-370039-02
61-370039-03 FLOW SWITCH ASSY
61-370039-03
61-370044-03 FLOW SWITCH ASSY
61-370044-03
62-307712-01 FLOW SWITCH ASSY
62-307712-01
714-214686-001 SPRING,SNUBBER,PINNED,CUP,XT
714-214686-001
771-297226-001 FLOW Switch ASSY
771-297226-001
771-297226-004 FLOW SWITCH ASSY
771-297226-004
771-297226-006 FLOW SWITCH ASSY
771-297226-006
771-297226-007 FLOW SWITCH ASSY
771-297226-007
799-165560-001 SPARE,CAP REPLACEMENT KIT,O2 SNSR
799-165560-001
853-169443-001 CA,ASSY,SNSR,DISSOLVED O2,DEGASSER,CELL1
853-169443-001
02-117255-00 ASSY, PS FLOW METER
02-117255-00
02-142638-00 ASSY, FLOW SNSR, 50ML, EBR, BSE
02-142638-00
ASSY, FLOW SNSR, 50ML, EBR, BSE
02-142639-00 ASSY, FLOW SNSR, 12ML, EBR, BSE
02-142639-00
ASSY, FLOW SNSR, 12ML, EBR, BSE
02-142640-00 ASSY,FLOW SNSR, 12ML, EBR, FSA
02-142640-00
15-173189-00 CUP,VAC,300MM ANNEAL, VESPEL
15-173189-00
15-302578-00 SNUBBER WAFER
15-302578-00
15-302588-00 MEMBRANE,CATIONIC,SAC,EXTREME,NEXTCELL
15-302588-00
15-327152-00 CUP,VACUUM,300MM
15-327152-00
15-365387-00 SNUBBER WAFER
15-365387-00
15-374450-00 MEMBRANE,CATIONIC,SAC,IRISCELL
15-374450-00
15-375743-00 MEMBRANE,PLATING CELL,SAC
15-375743-00
15-385111-00 MEMBRANE,CATIONIC,SAC,EXTREMECELL
15-385111-00
15-395485-00 MEMBRANE,PES,IA,SBR-3D_For Snag
15-395485-00
15-406361-00 MEMBRANE,PES,NI,SBR-3D
15-406361-00
15-412730-00 SNUBBER_300MM-APC
15-412730-00
15-428049-00 MEMBRANE,CATIONIC,EB,3D
15-428049-00
17-115725-00 SNUBBER WAFER
17-115725-00
20-135632-00 AIR CYL,DBL-ACTG 4"STROKE,3/4"
20-135632-00
22-138707-00 FILTER,1.5 MICRON,1/4 FLARE
22-138707-00
34-291572-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR
34-291572-00
15-282814-00 CUP,TOP,1MM EE
15-282814-00
15-269129-00 CUP,300MM,KNIFE EDGE,BOTTOM,X40
15-269129-00
15-267616-00 CUP,TOP,KNIFE EDGE,TAPERED,300
15-267616-00
15-169372-00 INSERT PADDLE 300MM VESPEL
15-169372-00
15-127251-01 COVER PLATE
15-127251-01
15-110411-00 WINDOW,SAPPHIRE
15-110411-00
15-10324-00 BUTTON, PIN
15-10324-00
15-054434-01 Excl RING MOER, 3mm edge exclusi
15-054434-01
15-053394-02 MINIMUM CONTACT AREA FORK 8"
15-053394-02
15-053394-01 MINIMUM CONTACT AREA FORK 6"
15-053394-01
15-052619-00 TONG,RING LIFE 200 MM
15-052619-00
15-033947-00 COVER, PLATE, 200MM, SEMI, SPEED
15-033947-00
15-032185-01 PIN WAFER CENTERING
15-032185-01
15-00742-00 TUBE,TC,CERAMIC
15-00742-00
15-00731-00 BUSHING, KEYED
15-00731-00
15-00700-00 PLATE, FORK BOTTOM 200MM WAFER
15-00700-00
15-00699-01 FORK,FINGER,150mm
15-00699-01
15-00680-00 SLEEVE CERMIC
15-00680-00
15-00578-00 CAP,CERAMIC FEEDTHRU
15-00578-00
15-00567-00 CERAMIC,TC
15-00567-00
15-00558-01 SHIELD,HTR STRAP 2.00 LG
15-00558-01
15-00485-00 BRKT, 150MM
15-00485-00
15-00484-00 RING,HTR CENTERING,CERAMIC
15-00484-00
15-00477-00 PLATE, BOTTOM, 1.25THK.
15-00477-00
15-00043-02 ADJUSTER,CERAMIC GAS PLATE
15-00043-02
839-031766-001 VCR BELLOWS
839-031766-001 VCR BELLOWS
839-012255-001 INNER GATE BELLOWS
839-012255-001
INNER GATE BELLOWS
796-010692-002 BELLOWS
796-010692-002
790-008220-001 GATE DOOR
790-008220-001
GATE DOOR
716-801667-005 WINDOW QTZ
716-801667-005
716-443234-002 RING FOCUS QTZ HP PLUS
716-443234-002
716-330891-002 TCP Quartz Window
716-330891-002
716-330504-064 FOCUS RING
716-330504-064 FOCUS RING
716-038612-003 LAM PIN, PICK UP, DC BIAS
716-038612-003
716-031453-002 RING , FLR CHAMBER , ESC
716-031453-002 RING , FLR CHAMBER , ESC
716-030136-001 RING,FOC,6" ESC(EDGE RING)
716-030136-001 RING,FOC,6" ESC(EDGE RING)
716-030135-001 EDGE RING
716-030135-001
716-028722-161 BOTTOM CERAMIC CLAMP
716-028722-161
716-028688-268 CLAMP RING
716-028688-268
716-028668-264 PLT, WFR CLMP, DOM SHDW
716-028668-264
716-028414-018 FOCUS RING
716-028414-018
716-028414-016 FOCUS RING
716-028414-016
716-028251-161 CLAMP WAFER, Ceramic
716-028251-161
716-028028-004 RING ELECTRODE CLAMP 6" 12BOL
716-028028-004
60-10312-00 GATE, VAT INSERT CASS W/ PERFL
60-10312-00
GATE, VAT INSERT CASS W/ PERFL
27-10127-00 GATE, VAT 1.21 W/PERFL-E
27-10127-00
GATE, VAT 1.21 W/PERFL-E
16-286986-00 BELLOWS
16-286986-00
16-00123-00 BELLOWS, WELDMENT
16-00123-00
15-357957-00 CUP,BOTTON,APC,1MM,PAI
15-357957-00
15-357896-00 CUP,BOTTOM,APC,1.75MM,PAI
15-357896-00
716-027740-808 Quartz LSR Window
716-027740-808
716-027740-001 WDO，QTZ
716-027740-001
716-022030-004 SLV,QTZ,STEPPED,PIN,DC BIAS
716-022030-004
716-018614-081 FOCUS RING
716-018614-081
716-012639-024 NOZ,INJ,8X .055-45DEG RDL
716-012639-024
716-011923-001 CLAMP WAFER PLATE ATTACHMENT
716-011923-001
716-011564-001 ELECTRODE, UPPER, GRAPHITE, 6", LAM1,2
716-011564-001
716-011563-261 PLATE, WAFER CLAMP
716-011563-261
716-011540-001 RING FACE UPPER ELECTRODE
716-011540-001
716-011057-002 RING FILLER UPPER
716-011057-002
716-011009-001 WINDOW
716-011009-001
716-006721-001 RING,INSULATOR
716-006721-001
715-330984-001 RING GAS 9400
715-330984-001
715-270588-002 SHOEWER HEAD
715-270588-002
715-028532-002 Ring,Cooling,8'Electro-static
715-028532-002
715-018991-206 Electrode,Aluminum.Anode 6"
715-018991-206
715-011985-006 CAP LOWER
715-011985-006
715-011913-080 LOWER BAFFLE
715-011913-080
715-011639-006 Cap, Electrode,thin edge semi 6"
715-011639-006
715-011531-015 UPPER ELECTRODE,ALUMINUM
715-011531-015
715-008220-105 DR,PLASMA,BARRIER,BMPR,ROOKER V,PM
715-008220-105
713-238718-002 Nozzle Tip,EBR,HD,PEM
713-238718-002
713-034965-001 PAD
713-034965-001
03-10411-00 SPRING T/C
03-10411-00
02-120403-00 THERMOCOUPLE SPRING LOADED 300MM
02-120403-00
0200-35294 QUARTZ,LOWER CHAMBER,VPRT,DPS
0200-35294
715-011900-001 Upper Baffle Dome 6"
715-011900-001
715-011901-006 Lower Baffle Dome 6"
715-011901-006
0020-31490 GAS DISTRIBUTION PLATE, 37 HOL
0020-31490
0200-09000 WINDOW HTR
0200-09000
0021-09902 GASKET ALUMINIUM
0021-09902
15-00701-00 PLATE,FORK,RETAINER,BOTTOM,150mm
15-00701-00
853-140018-001 CABLE ENCODER
853-140018-001
0020-32013 COVER,UNI-LID, W/SQ O-RING,METCH
0020-32013
0020-32260 GAS DIST PLATE,37 HOLES
0020-32260
19-034573-04 BEARING
19-034573-04
0040-20418 BELLOWS,SLIT VALVE ASSY
0040-20418
15-282824-00 CUP,TOP,1MM EE
15-282824-00
0020-42284 PLATE BLOCKER 6"EC WXZ
0020-42284
15-032777-00 EXCL. RING, 200MM, 2.0MM OH
15-032777-00
15-110411-00 WINDOW,SAPPHIRE
15-110411-00
03-00167-00 ASSY, INDUCT. 10.4 MILLIHENRY
03-00167-00
716-057993-003 INJECTOR,Ceramic,Kiyo3X G
716-057993-003
02-339691-00 ASSY,POT PROBE TIP
02-339691-00
02-121642-00 ESC,200MM
02-121642-00
715-330825-006 LINER,CHAMBER,AL,EXTEND,ALLIANCE
715-330825-006
0020-33881 TUBE STD CATHODE R2
0020-33881
02-160858-00 ASSY, COOLPEDLIFT, LDLK, VECTOR
02-160858-00
02-288189-00 Assy,300mm,Lift Pin Actr
02-288189-00
E17103110 PLATE,SCAN,FRONT,GROUND PLAT
E17103110
17-00148-00 SPRING FORK
17-00148-00
15-00027-02 GUIDE,NOZZLE ADJUSTER
15-00027-02
15-00027-02 GUIDE,NOZZLE ADJUSTER
15-00027-02
15-00703-00 PLATE,FORK,RETAINER,TOP,150mm
15-00703-00
0020-31493 GDP 133 HOLES
0020-31493
0020-21755 OUTER RING 6"
0020-21755
15-00835-00 Plateform, lift pin, WCVD
15-00835-00
15-167054-01 SHOWERHEAD,STD 2-5,300MM
15-167054-01
716-11563-268 FOCUS RING
716-11563-268
0020-27275 CLAMP RING,COH Ti/TiN POISON H
0020-27275
0021-09550 CHASSIS,PLATE, THROTTLE,5 PHAS
0021-09550
15-00702-00 PLATE, FORK TOP 200MM WAFER
15-00702-00
15-176142-00 SHOWERHEAD,STA 1,300MM
15-176142-00
716-013402-003 Ring , COV
716-013402-003
716-331088-004 R,EDGE,8 IN.,ES,NCH,TOP,QTZ,EXTND
716-331088-004
02-033394-00 ASSY PED 200MM STD
02-033394-00
E17335830 APERTURE,BASE PLATE,IHC,300MM,VIRTURE;,W
E17335830
15-01047-00 PADDLE, DIMPLE 100MM
15-01047-00
0200-09450 GAS TUBE
0200-09450
15-01124-00 PADDLE, DIMPLE, OPTICAL 100MM
15-01124-00
15-151335-00 LVR SCRN ROUND HDP 300
15-151335-00
27-264297-00 MODULE, SLIP RING
27-264297-00
34-288279-00 UV LAMP
34-288279-00
37-221-003 Electrode,Upper
37-221-003
0021-00042 FACE PLATE
0021-00042
0020-20439 VIEWPORT, COVER BUFFER/WAFER ORIENTER
0020-20439
0200-00410 UNI-INSERT,GAS DISTRIBUTION,QUARTZ,88 ho
0200-00410
0200-36697 Top Ring Si 200mm
0200-36697
04-709567-01 SHIELD,RING HTR TBL 6" SHIELD
04-709567-01
19-00056-00 FEEDTHRU,H.V.ALTER DETAIL
19-00056-00
26-83343-00 GROUND PLATE
26-83343-00
22-00612-00 VLV, DIA NC 1/4 FVCR AIR, OPER
22-00612-00
0200-35292 WINDOW,ENDPOINT,DPS MEC
0200-35292
0200-35334 WINDOW,VIEW,POLY DPS
0200-35334
60-00055-00 GAUGE,VACUUM,TUBE
60-00055-00
839-093786-001 BELLOWS, VAT V/V
839-093786-001
BELLOWS, VAT V/V
WELDMENT, BELLOWS, SLIT VALVE DOOR, DPS2
0040-09193
0200-35293 WINDOW,MANOMETER QUARTZ
0200-35293
15-00515-00 BUSHING, BEARING
15-00515-00
15-024498-00 FIANGE,VALVE ADAPTER
15-024498-00
275816 Convectron Gauge
275816
715-011229-001 Plate, Seal Exit Loadlock
715-011229-001
715-031454-001 COPY MAC PLATE WINDOWS CHAMBER
715-031454-001
790-008220-002 DOOR,W/BONDED SEAL,SLOT VALVE,CHEMRAZ
790-008220-002
DOOR,W/BONDED SEAL,SLOT VALVE,CHEMRAZ
G-100-PT ION GAUGE
G-100-PT
15-01123-00 PADDLE DIMPLE OPTICAL 125mm
15-01123-00
715-011531-008 Electrode,Aluminum,Anode
715-011531-008
0020-17540 PLATE,BLOCKER 150MM WXZ AMJ (PNT)
0020-17540
0020-30815 PLATE GAS DISTRIBUTION 37 HOLES
0020-30815
0200-08334 LIFT HOOP
0200-08334
715-011059-001 RING ORFICE
715-011059-001
715-011531-002 Electrode Alum
715-011531-002
715-140124-001 Upper Seal Baffle Plate
715-140124-001
715-140286-001 RING FOCUS 6"
715-140286-001
715-330889-002 Lam 9600 PTX Ground Ring
715-330889-002
716-011531-268 Wafer Clamp 6
716-011531-268
716-140141-001 RING HOT EDGE 15DEG ESC J-J6
716-140141-001
0040-21178 PRECLEAN II BELL JAR QTZ
0040-21178
0020-00991 Cathode Cover Tray
0020-00991
716-013344-006 RING,OUTER GROUND COVER
716-013344-006
15-11690-00 VIEWPORT CASSETTE CHAMBER
15-11690-00
0021-13890 COVER RING
0021-13890
0200-07514 INSULATOR, 300MM SOURCE ADAPTOR
0200-07514
839-011907-001 ELECTRODE, SILICON, 8"
839-011907-001
15-00077-00 Link, Cylinder
15-00077-00
15-11606-00 INSULATOR,GAS DIST,GERAMIC
15-11606-00
0190-35150 BALL, .40625 DIA GR 5
0190-35150
15-00126-00 STRAP, HEATER GND
15-00126-00
716-008645-004 COV,RING,QUARTZ,
716-008645-004
716-011036-001 RING FILLER ORIFICE ALUMINA
716-011036-001
716-016394-010 RING,CONFINEMENT ONE PIECE HPT
716-016394-010
716-031535-006 Ceramic Bottom Ring Clamp ESC
716-031535-006
716-040737-407 RING,CPLG,QTZ,W/BIAS PU,W
716-040737-407
716-044668-435 Hot Edge Ring BPK FE
716-044668-435
716-330915-003 INSULATE SLEEVE
716-330915-003
716-331142-010 Ring Edge Top
716-331142-010
716-443179-102 EDGE RING BASE
716-443179-102
853-189839-001 CA,SNSR ASSY,DISSOLVED O2,INLINE
853-189839-001
715-011913-080 LOWER BAFFLE
715-011913-080
715-011985-006 CAP LOWER
715-011985-006
4020-01019 FLTR CARTRIDGE 9-3/4 L 25 MICRON
4020-01019
03-106078-00 ASSY,TC,300MM SPRING LOADED
03-106078-00
34-00133-00 TEFLON FEEDTHRU
34-00133-00
280812 QTZ BAFFLE LARGE HOLE
280812
27-180262-00 THERMO COUPLE
27-180262-00
280252 QTZ BAFFLE SMALL HOLE
280252
715-011912-083 PLATE,UPPER BAFFLE
715-011912-083
715-011913-083 PLATE,LOWER BAFFLE
715-011913-083
715-140126-001 FACING UPPER BAFFLE
715-140126-001
715-443130-001 OUTER FOCUS RING
715-443130-001
0020-30570 PLATE GAS DIST 150MM HEWEB
0020-30570
0150-09802 Cable Assy,Neutral Power Lead
0150-09802
0150-09803 Cable Assy,Grmj Lead
0150-09803
0200-09579 COLLAR,SI,OX/MLR/NIT 200MM, FLAT
0200-09579
715-008721-002 CATHODE (lam 490)
715-008721-002
715-011639-008 Cap, Electrode, Lower
715-011639-008
715-140421-028 8" UPPER ELECTRODE
715-140421-028
716-006753-001 Insulator
716-006753-001
716-007136-010 RINF, QTZ,UPPER HPT
716-007136-010
0050-31101 COVER, GAS INLET, SSGD, MxP
0050-31101
715-011531-014 ELECTRODE
715-011531-014
16337-01 COLLAR.QTZ.1.25-IN-HOLE
16337-01
0992-70275 Grid Fine
0992-70275
0020-24531 Shield Adapter G-12 SST
0020-24531
15-00934-02 INDEXER,WF,EXCL,OPTION,200MM
15-00934-02
0020-03398 INSULATING PIPE QUARTZ
0020-03398
0020-26588 SHIELD 8"
0020-26588
716-443234-002 RING FOCUS QTZ HP PLUS
716-443234-002
0020-27190 SHIELD UPPER, G-12 FLAT HEAD,
0020-27190
17-024506-00 SHIELD,HEATED VALVE
17-024506-00
715-011531-014 ELECTRODE
715-011531-014
C3957-1118 Level Sensor
C3957-1118
0040-20283 BELLOWS,PRECLEAN
0040-20283
BELLOWS,PRECLEAN
714-495015-001 LINER,CHAMBER,TRANSFER,MANF
714-495015-001
716-021717-002 BELL JAR SLEEVE, 8.46
716-021717-002
766-009866-040 BELLOWS NW-40 ASSY KIT
766-009866-040
716-011652-006 KAPTON FILM 1m LWR ELEC CAP
716-011652-006
661-097953-001 UV LAMP
661-097953-001
0030-00157 Ring assy pedestal bottom150mm
0030-00157
60-00161-00 CYL, AIR, 1-1/8 BORE 1-1/4 STR
60-00161-00
716-140163-001 RING HOT EDGE
716-140163-001
0020-03673 CLAMP RING, 4, POLY, VERSION 3.0
0020-03673
0020-31596 Guide,Hinge,Unibody Cover
0020-31596
0020-31597 Insulator,Handle,Unibody Cover
0020-31597
0150-09801 Cable Assy,Line Power Lead
0150-09801
0020-31205 PLATE BLOCKER 4,5&6" BWCVD 185 THK
0020-31205
0200-09744 RING,FOCUSING,QTZ,150MM POLY/W
0200-09744
715-011986-108 ELECTRODE, LOWER
715-011986-108
716-020904-018 RING EDGE FOCUS 8 " L WFR
716-020904-018
22-250136-00 SEAL, CUP, PISTON
22-250136-00
0020-20340 DOOR TRANSFER SLIT VALVE
0020-20340
DOOR TRANSFER SLIT VALVE
20-00255-00 SPRING, WAVE, 2.12 OD
20-00255-00
15-00982-00 SHAFT, SPDL, WCVD RING LIFT
15-00982-00
0020-46659 BOTTOM LINER, AL TWIN CHAMBER 200MM PROD
0020-46659
0190-22280 MBODY,Gate,CH S/V(G67P),Centura AP
0190-22280
MBODY,Gate,CH S/V(G67P),Centura AP
17-024339-00 PANEL,HALF,5.08"
17-024339-00
17-024339-01 PANEL,HALF,13.93
17-024339-01
19-034573-13 BEARING
19-034573-13
19-034573-14 BEARING LINEAR DOUBLE
19-034573-14
720-009531-006 SCREW
720-009531-006
796-028633-010 SCREW
796-028633-010
720-000950-032 SCREW,SCR,SCH CAP,10-32*2LG
720-000950-032
713-011585-001 Cover Clamp Bolt
713-011585-001
80-679-012 SW OPT SLTD
80-679-012
80-127-063 SCR PNH PH
80-127-063
80-127-263 SCR SKTHD
80-127-263
80-128-143 SCREW UPPER
80-128-143
80-200-342 BAND CONT FEM
80-200-342
720-009531-010 FLT HD SCR 6-32KELF
720-009531-010
0140-00130 wZ-AXIS SUPERFLEX CABLE
0140-00130
15-307812-00 Plate, Fork, Bottom
15-307812-00
1810-221584-12 COOLING PLATE
1810-221584-12
26-82246-00 SPACER
26-82246-00
0010-00336 WAFER CLIP ASSY,LOWER
0010-00336
0992-70275 Grid Fine
0992-70275
D114090 SHLD SCR SHIELD RING, 200EA
D114090
20-00221-00 WASHER,FLAT#8 ALUMINUM
20-00221-00
720-090943-010 SCB FLAT HEAD 10-32 KEL-F
720-090943-010
SCREW , NICKEL
15-01104-B100
15-113064-00 NOZZLE,INJECTOR,SPEED/SPEE D-S
15-113064-00
26-82318-00 Handle Cover
26-82318-00
00-664198-00 ANODE COVER
00-664198-00
E19002530 Load Lock Valve BELLOWS
E19002530 Load Lock Valve BELLOWS
E19000070 BELLOWS
E19000070
E17087230 BELLOWS
E17087230 BELLOWS
94027-R1 GATE ALUMINIUM VITON SEAL VAT
94027-R1
GATE ALUMINIUM VITON SEAL VAT
91361-74001 SLIT VALVE DOOR
91361-74001
SLIT VALVE DOOR
6604-10075 BELLOWS
6604-10075
37-221-042 SHOWER HEAD 903
37-221-042
37-221-001 Tegal 903e Upper Electrode
37-221-001
1D80-001885-12 Robot 8 inch Fork
1D80-001885-12
1D10-407880-11 WINDOW,SHIELD DEPO(DRM2)
1D10-407880-11
1D10-404153-11 EDGE PRESSURE CERAMIC SLEEVE
1D10-404153-11
1D10-309822-12 SHIELD,DEPO 85-2(DRM2)
1D10-309822-12
1D10-101475-11 BAFFLE PLATE
1D10-101475-11
BAFFLE PLATE
17161640 BELLOWS
17161640
1D05-400020-13 BASE WINDOW A3 DRM2
1D05-400020-13
1917280 Axcelis Bellow
1917280
1D05-300040-13 RING,INSULATOR, C
1D05-300040-13
1910680 Unclamper BELLOWS
1910680
19S0217 BELLOWS
19S0217
1907760 BELLOWS
1907760
19S0170 BELLOWS
19S0170
1906900 Holder Chuck BELLOWS
1906900
19S0102 BELLOWS
19S0102
1906890 Wafer Holder BELLOWS
1906890
1906850 BELLOWS
1906850
11S7763 BELLOWS
11S7763
11S4278 BELLOWS
11S4278
0020-30580 BLOCKER PERF COM SIL4-6"
0020-30580
0020-30570 PLATE GAS DIST 150MM HEWEB
0020-30570
0020-30482 COUPLING,FLEX,8",OXIDE
0020-30482
0020-30481 CARRIER,8"W/FLEX
0020-30481
0020-30347 CYLINDER EXTERNAL
0020-30347
0020-31918 PLUG,DC ESC,RECESSED
0020-31918
0020-31708 CLAMP,VESPEL, OX/MLR/NIT, 150MM
0020-31708
0020-31628 WSHR,INSULATING, ESC
0020-31628
0020-31493 GDP 133 HOLES
0020-31493
0020-31463 CARRIER COMPLIANT EXT CATHODE
0020-31463
0020-31425 MIXER GAS BOX LID BWCVD
0020-31425
0020-30816 PLATE GAS DISTRIBUTION 13 HOLES (200MM
0020-30816
0020-30815 PLATE GAS DISTRIBUTION 37 HOLES
0020-30815
0020-30797 PLATE PERF 200MM GIANT GAP NI
0020-30797
0020-30678 RING CLAMPING VESPEL POLY 150MM
0020-30678
0020-40946 CLAMP RING, 8" SNNF, AL, 6 PADS, 2TABS
0020-40946
0020-34775 BLOCKER, PERF,SILOX 8",UNIV CH
0020-34775
0020-34606 BLOCKER PLATE
0020-34606
0020-34445 BLOCKER PLATE
0020-34445
0020-34113 INSULATOR, PEDESTAL, ULTEM
0020-34113
0020-33669 GAS DISTRIBUTION PLATE, SEE TH
0020-33669 GAS DISTRIBUTION PLATE, SEE TH
0020-33538 PLATE,PERF OX, 200MM UNANODIZE
0020-33538
0020-33373 INSULATING FLANGE ROUND FOR CL
0020-33373
0020-32036 PLATE BLOCKER
0020-32036
0021-00042 FACE PLATE
0021-00042
0021-00041 FACEPLATE SIN XG DXZ DCVD
0021-00041
0020-90213 BLOCKER PLATE,SILANE 200MM
0020-90213
0020-89922 RING, DEPOSITION, FLANGED, AL ARC SPRAY
0020-89922
0020-60201 DEPOSITION RING, 8"
0020-60201
0020-48701 CENTERING SCREW
0020-48701
0020-42287 PLATE,PERF 8" EC WXZ
0020-42287
0020-42286 SHOWERHEAD6" EC WXZ
0020-42286
0020-42285 PLATE,BLOCKER 8" EC WXZ
0020-42285
0020-42082 PUMPING PLATE
0020-42082
0021-06499 Manifold, Teflon Feed Thru, Lid, CH, PRD
0021-06499
0021-03637 FACE PLATE 200MM
0021-03637
0021-03568 FACEPLATE, 200MM SACVD PRODUCER
0021-03568
0021-03489 FACEPLAT
0021-03489
0021-03094 EDGE RING
0021-03094
0021-02156 RING,MIDDLE,ISOLATOR
0021-02156
0021-02155 RING,.LOWER,ISOLATOR
0021-02155
0021-01813 FACEPALTE, TEOS, PRODUCER 200MM
0021-01813
0021-01572 FACEPLATE, GIGA-FILL SACVD
0021-01572
0021-01571 FACE PLATE 200mm
0021-01571
0021-01570 Block Plate, GIGA fill SACVD
0021-01570
0021-15555 DEPOSITION RING,8" SNNF, ESC, ALUM, HIG"
0021-15555
0021-10395 CLAMPRING 163MM
0021-10395
0021-09914 BLOCKER PLATE 200mm
0021-09914
0021-09760 GAS BOX, DXZ
0021-09760
0021-09703 PLATE, BLOCKER 200MM NON R-F
0021-09703
0021-07418 SCREW, CENTERING
0021-07418
0021-07327 PLATE, BLOCKER, N2 CARRIER, 200MM SACVD
0021-07327
0021-06952 PERF PLATE, 200MM SINERGY
0021-06952
0020-03398 INSULATING PIPE QUARTZ
0020-03398
0020-01416 CLAMP RING, 8"
0020-01416
0015-09056 BELLOWS WAFER LIFT
0015-09056
0020-10191 PLATE BLOCKER 200MM
0020-10191
0020-10140 ISOLATOR SI-OX
0020-10140
0020-10137 BLOCK PLATE
0020-10137
0020-10120 FACE PLATE 100-150mm
0020-10120
0020-10119 PERF,PLATE SIH4
0020-10119
0020-10117 PERF PLATE 200MM TEOS
0020-10117
0020-09885 ISOLATOR N
0020-09885
0020-09373 SEAL, SMALL FACE
0020-09373
0020-09310 ISOLATOR
0020-09310
0020-09039 STRAP
0020-09039
0020-09029 COVER PIPE
0020-09029
0020-05364 DISK, 8" SHUTTER, SNNF BESC/ICE W/ CUTOU
0020-05364
0020-04181 INSULATING FLANGE, ROUND
0020-04181
0020-03597 CARRIER
0020-03597
0020-24386 COVER RING 6" 101 COVERAGE
0020-24386
0020-24236 CLIP SPRING PC II ANTENN A DOW
0020-24236
CLIP SPRING PC II ANTENN A DOW
0020-23625 RING CLAMP RING 6" TIN MIETEC
0020-23625
0020-23275 PEDESTAL, TI, 8" 101% COVERAGE
0020-23275
0020-23041 CLAMP, SHIELD 8" WAFER
0020-23041
0020-22909 PEDESTAL SHIELD, 6" PRECLEAN
0020-22909
0020-22844 PEDESTAL SHIELD 8 PRECLEA
0020-22844
0020-22510 CLAMP RING
0020-22510
0020-21462 INSULATOR SOURCE 11.30"
0020-21462
0020-20126 STAND OFF CERAMIC
0020-20126
0020-20123 Heater Isolator Ceramics
0020-20123
0020-10771 PERF PLATE 150MM OXIDE
0020-10771
0020-10402 PUMPING PLATE, 200MM
0020-10402
0020-26547 CLAMP RING 8" SNNF AL 6 PADS
0020-26547
0020-26474 CLAMP RING 6" SMF AL FOUR PAD
0020-26474
0020-26403 RING, COVER, 6" HTESC, ALUM."
0020-26403
0020-26312 SHIELD UPPER 8" DURASOURCE TTN
0020-26312
0020-26112 CLAMP RING 8" HOT SNNF ALUMINUM
0020-26112
0020-25854 BLADE 8.00 BUFFER THIN
0020-25854
0020-25279 CLAMP RING 8"
0020-25279
0020-25256 8" 101 SHUTTER DISC
0020-25256
0020-25059 CLAMP RING 6"
0020-25059
0020-24914 COVER RING SST 8" 101 COVERA
0020-24914
0020-24804 COVER RING SST 8" 101
0020-24804
0020-24641 CLAMP RING, 6"
0020-24641
0020-27945 CLAMP RING 6 INCH
0020-27945
0020-27804 PEDESTAL, A101 HI-PWR POIS COH-TITIN
0020-27804
0020-27766 CLAMP RING,6"
0020-27766
0020-27729 CLAMP RING 6"
0020-27729
0020-27702 CLAMP RING 8" SNNF, TI,3.404MM, 6 PADS
0020-27702
0020-27690 CLAMP RING 8" SNNF SHUT COMP
0020-27690
0020-27455 SHUTTER DISK
0020-27455
0020-27309 COVER RING 8" A101 TiN
0020-27309
0020-27205 CLAMP RING 8" SNNF HTHU 6 PAD
0020-27205
0020-27124 PEDESTAL
0020-27124
0020-27123 PEDESTAL PCII 8 SNNF
0020-27123
0020-27122 6" PCII TI PEDESTAL
0020-27122
0020-27113 CLAMP RING 6" SMF TI 00401ARS 2MM EE DU
0020-27113
0020-26601 Shutter Disc
0020-26601
0020-26588 SHIELD 8"
0020-26588
0200-01176 QUARTZ, COVER, TOP, 6" PIK II PCII
0200-01176
0200-01009 NOZZLE 4-HOLES 60 DEG, BAFFLE, ULTIMA
0200-01009
0200-00690 LID LINER, TXZ, 200MM
0200-00690
0200-00622 RING OUTER, 200MM WXZ+
0200-00622
0200-00353 SPACER PIN WxZ
0200-00353
0200-00230 RING DEP IMP TI
0200-00230
0200-00012 RING QUARTZ,5
0200-00012
0190-12806 Slit Valve Blocker Door
0190-12806
Slit Valve Blocker Door
0020-30314 PEDESTAL
0020-30314
0020-30286 PLATE, PERF CONFORMAL SILANE NITRIDE 200
0020-30286
0020-30086 PLATE PERFORATED 150MM NITRIDE GIANT GAP
0020-30086
0020-29592 CLAMP RING 8"
0020-29592
0020-29431 CLAMP RING,8"SNNF,SST
0020-29431
0020-29343 SHIELD CLAMP
0020-29343
0020-29202 CLAMP RING, 6"
0020-29202
0020-28937 PEDESTAL COVER 8" ADV 101, FUL
0020-28937
0020-28346 CLAMP RING 8"
0020-28346
0020-28206 SHIELD, UPPER, HI-PWR POIS COH
0020-28206
0020-28205 COVER RING, 6" 101% HI-PWR COH TI/TIN
0020-28205
0200-09950 ISOLATOR EC LID WXZ
0200-09950
0200-09824 SHIELD FLAT 125MM CERAMIC PEDE
0200-09824
0200-09822 CLAMP RING,125mm,CERAMIC(P2)
0200-09822
0200-09759 SHIELD RING 150MM
0200-09759
0200-09757 RING,CLAMPING,FLAT,AL,150MM
0200-09757
0200-09735 COVER,CLAMPING RING 150MM
0200-09735
0200-09716 PIN,LIFT,HEATER,WxZ
0200-09716
0200-09664 WINDOW SLIT
0200-09664
0200-09626 COLLER FLAT, SILICON
0200-09626
0200-09611 COLLAR,SI, OX,125MM,FLAT
0200-09611
0200-09366 PLUG DC GRAPHITE POLY 150MM
0200-09366
0200-09347 SILICON COLLAR
0200-09347
0200-09216 RING,PEDESTAL
0200-09216
0200-09185 Pin, wafer Lift
0200-09185
0200-09121 SHIELD 4,5,6 BW
0200-09121
0200-09093 RING 100MM
0200-09093
0200-09091SPUTTER RING
0200-09091
0200-09075 ADAPTER PLATE PUMPING 200MM
0200-09075
0200-02577 LIFT PLATE, FIXED LIFT PIN, 200MM PRODUC
0200-02577
0200-02576 LIFT RING, FIXED LIFT PIN, 200MM PRODUCE
0200-02576
0200-02116 INJECTOR, GAS,CERAMIC
0200-02116
0200-35356 RING,FOCUS 1" CERAMIC
0200-35356
0200-35351 RING,FOCUS 1" CERAMIC
0200-35351
0200-35350 RING,CAPTURE,ESC145MM,SEMI FLA
0200-35350
0200-18093 NOZZLE, ALL CERAMIC 2.55L, 1.5
0200-18093
0200-18090 INSULATOR
0200-18090
0200-18086 NOZZLE,CERAMIC HDP-CVD ULTIMA
0200-18086
0200-18053 GUIDE LIFT PIN
0200-18053
0200-10446 INSERT RING.SILICON
0200-10446
0200-10284 PIN,LIFT,HEATER,DXZ
0200-10284
0200-10087 RING, OUTER, 1.50",SSGD,R2 CHAMBER
0200-10087
0200-10027 RING,INNER,1.50",DBL ANNULUS,SGD
0200-10027
0200-09969 WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ
0200-09969
3700-02717 SEALSLIT VALVE DOOR
3700-02717
SEALSLIT VALVE DOOR
0200-39135 WINDOW, MONOMETER PORT, DPS MEC
0200-39135
0200-39133 WINDOW, ENDPOINT, INNER DPS MEC
0200-39133
0200-35801 WINDOW,RECESSED ENDPOINT,4MM
0200-35801
0200-35623 INSERT RING SILICON, 150MMI
0200-35623
0200-35432 RING, SINGLE, ESC 145MM, SEMIFLAT
0200-35432
0200-35430 RING,SINGLE,CERAMIC,145MM
0200-35430
0200-35357 RING,CAPTURE,ESC145MM,JEIDA FL
0200-35357
0041-03157 ASSY, SWLL BELLOWS, ENHANCED
0041-03157
0040-96157 300mm Slit Valve Door
0040-96157
300mm Slit Valve Door
0040-83331 LINER, CATHODE, DIRECT-COOLED, BAFFLE, E
0040-83331
0040-78750 SEAL PLATE 300MM L-DOOR VULCANIZED
0040-78750
SEAL PLATE 300MM L-DOOR VULCANIZED
0040-75904 BELLOWS
0040-75904
0040-52451 FACE PLATE, HP+ TXZ 200MM
0040-52451
0040-47677 FACE PLATE, SIN, XG, DXZ DCVD (200MM)
0040-47677
0040-39372 BELLOW WELDMENT, THROTTLE VALVE, DPS
0040-39372
0040-37504 SLIT VALVE DOOR
0040-37504
SLIT VALVE DOOR
0040-33701 HEATER BLOCK INSERT ASSY ULTIMA
0040-33701
0040-32190 200mm DPS cooling base
0040-32190
0040-31844 ASSY, BELLOWS, LIFT PIN
0040-31844
0040-09212 ASSY WAFER LIFT RING
0040-09212
0040-09094 CHAMBER 200MM
0040-09094
0040-09005 BASE STD CATHODE
0040-09005
0040-04650 RING, SYM. GAS DIST. 24 PORTS, ULTIMA
0040-04650
0040-04192 FACE PLATE
0040-04192
0040-02817 MANIFOLD OUTPUT 1 HOLE RIGHT PRODUCE
0040-02817
0040-02816 MANIFOLD, OUTPUT, 1 HOLE, LEFT, PRODUCER
0040-02816
0030-09050 LIP SEAL, LARGE
0030-09050
0030-09036 SEAL FINGER HOLE PEDES
0030-09036
3550-01117 PIN
3550-01117
0030-00195 LARGE FACE SEAL 150MM
0030-00195
0022-21001 CLAMP VESPEL OX/MLR/NIT 150MM WITH GROOV
0022-21001
0022-20933 CLAMPING RING POLY163MM
0022-20933
0022-20178 CLAMP VESPEL OX/MLR/NIT 150MM WITH GROOV
0022-20178
0021-70210 DEPOSITION RING 8"SN
0021-70210
0021-70103 CLAMP RING, 8"
0021-70103
0021-54545 BLOCKER, PERF,SILOX 8",UNIV CH
0021-54545
0021-40087 BASE FLANGE
0021-40087
0021-39748 BLOCKER, PERF, SILANE, NITRIDE550
0021-39748
0021-38119 FACE PLATE DXZ 200mm
0021-38119
0021-35869 Perf Plate, TxZ 200mm
0021-35869
0021-35788 PLATE BLOCKER 200MM, CVD AL
0021-35788
0021-35749 RING,ISOLATOR,TxZ,200MM,SNNF
0021-35749
0021-35744 PLATE,BLOCKER,TXZ 200MM
0021-35744
0021-35087 PLATE,BLOCKER,N2/HE CARRIER GAS,DXZ/UNIV
0021-35087
0021-26609 SHUTTER DISK, A101, TTN, CENTER PIN, BLU
0021-26609
0021-26544 BLOCKER TEOS HI DEP RATE 300MM PRODUCER
0021-26544
0021-25079 RING, CENTERING, TEOS 200MM PRODUCER
0021-25079
0021-24811 INSERT LINER, EXHAUST, TXZ 200MM
0021-24811
0021-22361 CLAMP RING,6" SMF SST, Ti
0021-22361
0021-20789 RING, DEPOSITION 8"
0021-20789
0021-20718 PEDESTAL COVER LOWER
0021-20718
0021-20437 DISK 8" B101 TI SHUTTER
0021-20437
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近30年以來半導體產業的人脈、各種零件生產製造和各國貿易往來的相關經驗，提供給您最專業的諮詢與服務。
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近30年以來半導體產業的人脈、各種零件生產製造和各國貿易往來的相關經驗，提供給您最專業的諮詢與服務。
~歡迎您與我們聯繫~ sales@mammontek.com
+886-2-268-2706
更多