Home Spare Parts 庫存品銷售 List | Image Loading...... 19-053642-00 DIFFUSER WTS 19-053642-00 DIFFUSER WTS 0200-07761 PIN ANTENNA POLI SI 300MM 0200-07761 PIN ANTENNA POLI SI 300MM 713-020911-102 PLUNGER WAFER CLAMP 713-020911-102 PLUNGER WAFER CLAMP 19-00149-00 GEAR 19-00149-00 201-017 BEARING 201-017 20-00214-00 Spring, Bearing , Preload 20-00214-00 19-034573-03 BEARING.BALL.50 IDX.875 19-034573-03 20-00070-00 RING, RETAINING EXT. 1/2" 20-00070-00 19-00064-00 BRG Bearing 19-00064-00 20-00258-00 Wave Spring 20-00258-00 20-00259-00 Wave Spring 20-00259-00 22-118218-00 BEARING BALL,DEEP,GROOVE 22-118218-00 22-10064-00 BEARING 22-10064-00 22-046263-00 COUPLING 1/4 BERG 22-046263-00 22-00302-00 COUPLING 22-00302-00 22-00744-00 VALVE DIA 1/8" VCR LIQUID 22-00744-00 22-00357-00 COUPLING,PANEL Mt.1/8" FLOW,10-32 22-00357-00 22-00132-00 Collar,Setscrew,1/4 22-00132-00 22-00683-00 T-SEAL, 15/16ID CHEMTEMP 22-00683-00 22-101315-00 Shaft, Spacer 22-101315-00 22-00417-00 GASKET,VCR NICKEL RET 22-00417-00 22-110586-00 SEAL,BONNET,VAT,200MM 22-110586-00 34-10095-00 Relay,SSR 240V 25A 34-10095-00 34-00056-00 Switch,Interlock 34-00056-00 34-00022-00 Relay,S/S,25A 34-00022-00 34-00010-01 FEEDTHRU.ELECTRICAL.19PIN.VAC 34-00010-01 3310-01055 Convectron Gauge 3310-01055 27-229907-00 TC GAUGE 27-229907-00 27-00079-00 THERMOCOUPLE TYPE 27-00079-00 34-00102-00 SWITCH, OVERTRAVEL PLUNGER 34-00102-00 31-00293-00 AMPLIFIER,BANNER 31-00293-00 3080-01041 BELT TMG .080P 3080-01041 26-81433-00 SHIELD CAP STRAP 26-81433-00 69-337513-00 GREASE,NYETORR 5300,10CC SRNG 69-337513-00 676-000504-003 MOTOR 12VDC 676-000504-003 39-732-001 COLLAR PIN 39-732-001 60-00183-00 Flow Contro, Elbow 60-00183-00 56-100217-00 Lamp Quartz UV Spectrometer Halogen V 56-100217-00 39-70466-00 PLUG,NEMA5-15P,15A,125V,RT ANG 39-70466-00 40-297-002 QUARTZ PIN 40-297-002 36-00012-00 FUSE, 40A FAST ACTING 36-00012-00 40-297-001 PIN,QUARTZ, 901E 40-297-001 80-871-146 SCABLE MTCH NTWK 903 80-871-146 80-195-119 FITTING , VCR 80-195-119 768-090914-001 SWITCH,VACUUM 768-090914-001 715-011148-002 ARM,CHAIN TENSIONER 715-011148-002 770-007575-001 CYLINDER,MINI-PANCAKE 1/2" BORE 770-007575-001 746-007700-001 BEARING. RADIAL BALL. 375 BORE 746-007700-001 713-012546-001 HOSE COILED 713-012546-001 0020-32260 GAS DIST PLATE,37 HOLES 0020-32260 0020-32013 COVER,UNI-LID, W/SQ O-RING,METCH 0020-32013 853-140018-001 CABLE ENCODER 853-140018-001 15-00701-00 PLATE,FORK,RETAINER,BOTTOM,150mm 15-00701-00 0021-09902 GASKET ALUMINIUM 0021-09902 0200-09000 WINDOW HTR 0200-09000 0020-31490 GAS DISTRIBUTION PLATE, 37 HOL 0020-31490 715-011901-006 Lower Baffle Dome 6" 715-011901-006 715-011900-001 Upper Baffle Dome 6" 715-011900-001 0200-35294 QUARTZ,LOWER CHAMBER,VPRT,DPS 0200-35294 02-339691-00 ASSY,POT PROBE TIP 02-339691-00 716-057993-003 INJECTOR,Ceramic,Kiyo3X G 716-057993-003 03-00167-00 ASSY, INDUCT. 10.4 MILLIHENRY 03-00167-00 15-110411-00 WINDOW,SAPPHIRE 15-110411-00 15-032777-00 EXCL. RING, 200MM, 2.0MM OH 15-032777-00 0020-42284 PLATE BLOCKER 6"EC WXZ 0020-42284 15-282824-00 CUP,TOP,1MM EE 15-282824-00 0040-20418 BELLOWS,SLIT VALVE ASSY 0040-20418 19-034573-04 BEARING 19-034573-04 15-00027-02 GUIDE,NOZZLE ADJUSTER 15-00027-02 15-00027-02 GUIDE,NOZZLE ADJUSTER 15-00027-02 17-00148-00 SPRING FORK 17-00148-00 E17103110 PLATE,SCAN,FRONT,GROUND PLAT E17103110 02-288189-00 Assy,300mm,Lift Pin Actr 02-288189-00 02-160858-00 ASSY, COOLPEDLIFT, LDLK, VECTOR 02-160858-00 0020-33881 TUBE STD CATHODE R2 0020-33881 715-330825-006 LINER,CHAMBER,AL,EXTEND,ALLIANCE 715-330825-006 02-121642-00 ESC,200MM 02-121642-00 E17335830 APERTURE,BASE PLATE,IHC,300MM,VIRTURE;,W E17335830 02-033394-00 ASSY PED 200MM STD 02-033394-00 716-331088-004 R,EDGE,8 IN.,ES,NCH,TOP,QTZ,EXTND 716-331088-004 716-013402-003 Ring , COV 716-013402-003 15-176142-00 SHOWERHEAD,STA 1,300MM 15-176142-00 15-00702-00 PLATE, FORK TOP 200MM WAFER 15-00702-00 0021-09550 CHASSIS,PLATE, THROTTLE,5 PHAS 0021-09550 0020-27275 CLAMP RING,COH Ti/TiN POISON H 0020-27275 716-11563-268 FOCUS RING 716-11563-268 15-167054-01 SHOWERHEAD,STD 2-5,300MM 15-167054-01 15-00835-00 Plateform, lift pin, WCVD 15-00835-00 0020-21755 OUTER RING 6" 0020-21755 0020-31493 GDP 133 HOLES 0020-31493 15-00703-00 PLATE,FORK,RETAINER,TOP,150mm 15-00703-00 26-83343-00 GROUND PLATE 26-83343-00 19-00056-00 FEEDTHRU,H.V.ALTER DETAIL 19-00056-00 04-709567-01 SHIELD,RING HTR TBL 6" SHIELD 04-709567-01 0200-36697 Top Ring Si 200mm 0200-36697 0020-20439 VIEWPORT, COVER BUFFER/WAFER ORIENTER 0020-20439 37-221-003 Electrode,Upper 37-221-003 34-288279-00 UV LAMP 34-288279-00 27-264297-00 MODULE, SLIP RING 27-264297-00 15-151335-00 LVR SCRN ROUND HDP 300 15-151335-00 15-01124-00 PADDLE, DIMPLE, OPTICAL 100MM 15-01124-00 0200-09450 GAS TUBE 0200-09450 15-01047-00 PADDLE, DIMPLE 100MM 15-01047-00 0020-17540 PLATE,BLOCKER 150MM WXZ AMJ (PNT) 0020-17540 715-011531-008 Electrode,Aluminum,Anode 715-011531-008 15-01123-00 PADDLE DIMPLE OPTICAL 125mm 15-01123-00 G-100-PT ION GAUGE G-100-PT 715-031454-001 COPY MAC PLATE WINDOWS CHAMBER 715-031454-001 715-011229-001 Plate, Seal Exit Loadlock 715-011229-001 275816 Convectron Gauge 275816 15-024498-00 FIANGE,VALVE ADAPTER 15-024498-00 15-00515-00 BUSHING, BEARING 15-00515-00 0200-35293 WINDOW,MANOMETER QUARTZ 0200-35293 WELDMENT, BELLOWS, SLIT VALVE DOOR, DPS2 0040-09193 60-00055-00 GAUGE,VACUUM,TUBE 60-00055-00 0200-35334 WINDOW,VIEW,POLY DPS 0200-35334 0200-35292 WINDOW,ENDPOINT,DPS MEC 0200-35292 22-00612-00 VLV, DIA NC 1/4 FVCR AIR, OPER 22-00612-00 15-00126-00 STRAP, HEATER GND 15-00126-00 0190-35150 BALL, .40625 DIA GR 5 0190-35150 15-11606-00 INSULATOR,GAS DIST,GERAMIC 15-11606-00 15-00077-00 Link, Cylinder 15-00077-00 839-011907-001 ELECTRODE, SILICON, 8" 839-011907-001 0200-07514 INSULATOR, 300MM SOURCE ADAPTOR 0200-07514 0021-13890 COVER RING 0021-13890 15-11690-00 VIEWPORT CASSETTE CHAMBER 15-11690-00 716-013344-006 RING,OUTER GROUND COVER 716-013344-006 0020-00991 Cathode Cover Tray 0020-00991 0040-21178 PRECLEAN II BELL JAR QTZ 0040-21178 716-140141-001 RING HOT EDGE 15DEG ESC J-J6 716-140141-001 716-011531-268 Wafer Clamp 6 716-011531-268 715-330889-002 Lam 9600 PTX Ground Ring 715-330889-002 715-140286-001 RING FOCUS 6" 715-140286-001 715-140124-001 Upper Seal Baffle Plate 715-140124-001 715-011531-002 Electrode Alum 715-011531-002 715-011059-001 RING ORFICE 715-011059-001 0020-30815 PLATE GAS DISTRIBUTION 37 HOLES 0020-30815 0020-30570 PLATE GAS DIST 150MM HEWEB 0020-30570 715-443130-001 OUTER FOCUS RING 715-443130-001 715-140126-001 FACING UPPER BAFFLE 715-140126-001 715-011913-083 PLATE,LOWER BAFFLE 715-011913-083 715-011912-083 PLATE,UPPER BAFFLE 715-011912-083 280252 QTZ BAFFLE SMALL HOLE 280252 27-180262-00 THERMO COUPLE 27-180262-00 280812 QTZ BAFFLE LARGE HOLE 280812 34-00133-00 TEFLON FEEDTHRU 34-00133-00 03-106078-00 ASSY,TC,300MM SPRING LOADED 03-106078-00 4020-01019 FLTR CARTRIDGE 9-3/4 L 25 MICRON 4020-01019 715-011985-006 CAP LOWER 715-011985-006 715-011913-080 LOWER BAFFLE 715-011913-080 853-189839-001 CA,SNSR ASSY,DISSOLVED O2,INLINE 853-189839-001 716-443179-102 EDGE RING BASE 716-443179-102 716-331142-010 Ring Edge Top 716-331142-010 716-330915-003 INSULATE SLEEVE 716-330915-003 716-044668-435 Hot Edge Ring BPK FE 716-044668-435 716-040737-407 RING,CPLG,QTZ,W/BIAS PU,W 716-040737-407 716-031535-006 Ceramic Bottom Ring Clamp ESC 716-031535-006 716-016394-010 RING,CONFINEMENT ONE PIECE HPT 716-016394-010 716-011036-001 RING FILLER ORIFICE ALUMINA 716-011036-001 716-008645-004 COV,RING,QUARTZ, 716-008645-004 716-007136-010 RINF, QTZ,UPPER HPT 716-007136-010 716-006753-001 Insulator 716-006753-001 715-140421-028 8" UPPER ELECTRODE 715-140421-028 715-011639-008 Cap, Electrode, Lower 715-011639-008 715-008721-002 CATHODE (lam 490) 715-008721-002 0200-09579 COLLAR,SI,OX/MLR/NIT 200MM, FLAT 0200-09579 0150-09803 Cable Assy,Grmj Lead 0150-09803 0150-09802 Cable Assy,Neutral Power Lead 0150-09802 0150-09801 Cable Assy,Line Power Lead 0150-09801 0020-31597 Insulator,Handle,Unibody Cover 0020-31597 0020-31596 Guide,Hinge,Unibody Cover 0020-31596 0020-03673 CLAMP RING, 4, POLY, VERSION 3.0 0020-03673 716-140163-001 RING HOT EDGE 716-140163-001 60-00161-00 CYL, AIR, 1-1/8 BORE 1-1/4 STR 60-00161-00 0030-00157 Ring assy pedestal bottom150mm 0030-00157 661-097953-001 UV LAMP 661-097953-001 716-011652-006 KAPTON FILM 1m LWR ELEC CAP 716-011652-006 766-009866-040 BELLOWS NW-40 ASSY KIT 766-009866-040 716-021717-002 BELL JAR SLEEVE, 8.46 716-021717-002 714-495015-001 LINER,CHAMBER,TRANSFER,MANF 714-495015-001 C3957-1118 Level Sensor C3957-1118 715-011531-014 ELECTRODE 715-011531-014 17-024506-00 SHIELD,HEATED VALVE 17-024506-00 0020-27190 SHIELD UPPER, G-12 FLAT HEAD, 0020-27190 716-443234-002 RING FOCUS QTZ HP PLUS 716-443234-002 0020-26588 SHIELD 8" 0020-26588 0020-03398 INSULATING PIPE QUARTZ 0020-03398 15-00934-02 INDEXER,WF,EXCL,OPTION,200MM 15-00934-02 0020-24531 Shield Adapter G-12 SST 0020-24531 0992-70275 Grid Fine 0992-70275 16337-01 COLLAR.QTZ.1.25-IN-HOLE 16337-01 715-011531-014 ELECTRODE 715-011531-014 0050-31101 COVER, GAS INLET, SSGD, MxP 0050-31101 1810-221584-12 COOLING PLATE 1810-221584-12 15-307812-00 Plate, Fork, Bottom 15-307812-00 0140-00130 wZ-AXIS SUPERFLEX CABLE 0140-00130 720-009531-010 FLT HD SCR 6-32KELF 720-009531-010 80-200-342 BAND CONT FEM 80-200-342 80-128-143 SCREW UPPER 80-128-143 80-127-263 SCR SKTHD 80-127-263 80-127-063 SCR PNH PH 80-127-063 80-679-012 SW OPT SLTD 80-679-012 713-011585-001 Cover Clamp Bolt 713-011585-001 720-000950-032 SCREW,SCR,SCH CAP,10-32*2LG 720-000950-032 796-028633-010 SCREW 796-028633-010 720-009531-006 SCREW 720-009531-006 19-034573-14 BEARING LINEAR DOUBLE 19-034573-14 19-034573-13 BEARING 19-034573-13 17-024339-01 PANEL,HALF,13.93 17-024339-01 17-024339-00 PANEL,HALF,5.08" 17-024339-00 0020-46659 BOTTOM LINER, AL TWIN CHAMBER 200MM PROD 0020-46659 15-00982-00 SHAFT, SPDL, WCVD RING LIFT 15-00982-00 20-00255-00 SPRING, WAVE, 2.12 OD 20-00255-00 22-250136-00 SEAL, CUP, PISTON 22-250136-00 716-020904-018 RING EDGE FOCUS 8 " L WFR 716-020904-018 715-011986-108 ELECTRODE, LOWER 715-011986-108 0200-09744 RING,FOCUSING,QTZ,150MM POLY/W 0200-09744 0020-31205 PLATE BLOCKER 4,5&6" BWCVD 185 THK 0020-31205 00-664198-00 ANODE COVER 00-664198-00 26-82318-00 Handle Cover 26-82318-00 15-113064-00 NOZZLE,INJECTOR,SPEED/SPEE D-S 15-113064-00 SCREW , NICKEL 15-01104-B100 720-090943-010 SCB FLAT HEAD 10-32 KEL-F 720-090943-010 20-00221-00 WASHER,FLAT#8 ALUMINUM 20-00221-00 D114090 SHLD SCR SHIELD RING, 200EA D114090 0992-70275 Grid Fine 0992-70275 0010-00336 WAFER CLIP ASSY,LOWER 0010-00336 26-82246-00 SPACER 26-82246-00
