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61-370039-01 FLOW SWITCH ASSY

61-370039-01
FLOW SWITCH ASSY
771-297226-008 FLOW SWITCH ASSY

771-297226-008
FLOW SWITCH ASSY
771-297226-009 FLOW SWITCH ASSY

771-297226-009
FLOW SWITCH ASSY
15-280354-00 RING GUARD EXT CATHODE LTM

15-280354-00
RING GUARD EXT CATHODE LTM
15-303364-00 C3 SPACER DISK PEDESTAL

15-303364-00
C3 SPACER DISK PEDESTAL
61-370044-01 FLOW SWITCH ASSY

61-370044-01
FLOW SWITCH ASSY
61-327620-00 FLOW SWITCH ASSY

61-327620-00
FLOW SWITCH ASSY
715-011622-101 LFTR,WFR 4-PIN FLEX

715-011622-101
LFTR,WFR 4-PIN FLEX
15-032631-00 FLANGE, KEYED SPINDLE ASSY

15-032631-00
FLANGE, KEYED SPINDLE ASSY
716-020905-001 RING,FILLER LWR WFR CLAP

716-020905-001
RING,FILLER LWR WFR CLAP
716-460875-002 INSUL, LWR ELCTD, STP CHAMBER

716-460875-002
INSUL, LWR ELCTD, STP CHAMBER
716-330892-007 GDP,PL,SH HD,CER,21 HOLE,9600PTX

716-330892-007
GDP,PL,SH HD,CER,21 HOLE,9600PTX
02-307391-00 G10 Dome 8" Standard

02-307391-00
8" Standard G10 Dome
716-011570-001 ORIFICE FILLER W/C CERAMIC

716-011570-001
ORIFICE FILLER W/C CERAMIC
15-147608-00 E-PEC

15-147608-00 E-PEC
716-330045-004 R,EDGE 8" NCH,SHDW R,ESC

716-330045-004
R,EDGE 8" NCH,SHDW R,ESC
716-330121-001 UPPER SHAPED WINDOW

716-330121-001 UPPER SHAPED WINDOW
15-293564-00 BLADE, LOAD/UNLOAD, MCA

15-293564-00
BLADE, LOAD/UNLOAD, MCA
771-297226-010 FLOW SWITCH ASSY

771-297226-010
FLOW SWITCH ASSY
839-250568-001 BELLOWS

839-250568-001 BELLOWS
839-330743-002 LAM BSR BELLOWS

839-330743-002
LAM BSR BELLOWS
60-121857-00 GATE ALUMINIUM

60-121857-00
GATE ALUMINIUM
60-119965-00 GATE,50MM X 336MM

60-119965-00
GATE,50MM X 336MM
22-117504-00 SEAL,WAFER,296MM

22-117504-00
SEAL,WAFER,296MM
713-028553-102 RING CONFINEMNT

713-028553-102
713-028487-003 CONFINEMENT RING

713-028487-003
713-028487-001 CONFINEMENT RING

713-028487-001 CONFINEMENT RING
17-413579-00 Plate, Charge, Ti

17-413579-00
16-385621-00 PROBE,POT,IRISCELL

16-385621-00
15-372361-00 Gasket,SAC,Membrane,Seal,Iriscell

15-372361-00
15-119067-00 MODIFIED CUP, END EFFECTOR

15-119067-00
15-112705-00 Holder Cap Retainer

15-112705-00
15-01102-00 HUB,EXCLUSION RING

15-01102-00
15-01101-00 HUB,INDEXER

15-01101-00
15-00975-00 Lift Pin, Load Station 4.47"

15-00975-00
15-00921-00 BUSHING, UPPER, EXCL OPTION

15-00921-00
04-417024-00 KIT,PEM CHUCK,BUTTON AND HOLDERS,SBR-XT

04-417024-00
02-347254-01 ASSY,PROBE,POTENTIOSTATIC,CELL1

02-347254-01
15-112704-00 HOLDER,LIFT PIN

15-112704-00
HOLDER,LIFT PIN
853-169443-001 CA,ASSY,SNSR,DISSOLVED O2,DEGASSER,CELL1

853-169443-001
799-165560-001 SPARE,CAP REPLACEMENT KIT,O2 SNSR

799-165560-001
771-297226-007 FLOW SWITCH ASSY

771-297226-007
771-297226-006 FLOW SWITCH ASSY

771-297226-006
771-297226-004 FLOW SWITCH ASSY

771-297226-004
771-297226-001 FLOW Switch ASSY

771-297226-001
714-214686-001 SPRING,SNUBBER,PINNED,CUP,XT

714-214686-001
62-307712-01 FLOW SWITCH ASSY

62-307712-01
61-370044-03 FLOW SWITCH ASSY

61-370044-03
61-370039-03 FLOW SWITCH ASSY

61-370039-03
61-370039-02 FLOW SENSOR

61-370039-02
61-327809-00 FLOW SWITCH ASSY

61-327809-00
34-384779-00 SENSOR,PROXIMITY/REFLEX,NPN,30VDC,4PIN M

34-384779-00
34-291574-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR

34-291574-00
34-291573-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR

34-291573-00
34-291572-00 SWITCH, WATER FLOW, 3E-3GPM,1/8,EBR

34-291572-00
22-138707-00 FILTER,1.5 MICRON,1/4 FLARE

22-138707-00
20-135632-00 AIR CYL,DBL-ACTG 4"STROKE,3/4"

20-135632-00
17-115725-00 SNUBBER WAFER

17-115725-00 SNUBBER WAFER
15-428049-00 MEMBRANE,CATIONIC,EB,3D

15-428049-00
15-412730-00 SNUBBER_300MM-APC

15-412730-00
15-406361-00 MEMBRANE,PES,NI,SBR-3D

15-406361-00
15-395485-00 MEMBRANE,PES,IA,SBR-3D_For Snag

15-395485-00
15-385111-00 MEMBRANE,CATIONIC,SAC,EXTREMECELL

15-385111-00
MEMBRANE,CATIONIC,SAC,EXTREMECELL
15-375743-00 MEMBRANE,PLATING CELL,SAC

15-375743-00
15-374450-00 MEMBRANE,CATIONIC,SAC,IRISCELL

15-374450-00
15-365387-00 SNUBBER WAFER

15-365387-00
15-327152-00 CUP,VACUUM,300MM

15-327152-00
15-302588-00 MEMBRANE,CATIONIC,SAC,EXTREME,NEXTCELL

15-302588-00
15-302578-00 SNUBBER WAFER

15-302578-00 SNUBBER WAFER
15-173189-00 CUP,VAC,300MM ANNEAL, VESPEL

15-173189-00
CUP,VAC,300MM ANNEAL, VESPEL
02-142640-00 ASSY,FLOW SNSR, 12ML, EBR, FSA

02-142640-00
02-142639-00 ASSY, FLOW SNSR, 12ML, EBR, BSE

02-142639-00
ASSY, FLOW SNSR, 12ML, EBR, BSE
02-142638-00 ASSY, FLOW SNSR, 50ML, EBR, BSE

02-142638-00
ASSY, FLOW SNSR, 50ML, EBR, BSE
02-117255-00 ASSY, PS FLOW METER

02-117255-00
15-00043-02 ADJUSTER,CERAMIC GAS PLATE

15-00043-02
15-00477-00 PLATE, BOTTOM, 1.25THK.

15-00477-00
15-00484-00 RING,HTR CENTERING,CERAMIC

15-00484-00
15-00485-00 BRKT, 150MM

15-00485-00
15-00558-01 SHIELD,HTR STRAP 2.00 LG

15-00558-01
15-00567-00 CERAMIC,TC

15-00567-00
15-00578-00 CAP,CERAMIC FEEDTHRU

15-00578-00
15-00680-00 SLEEVE CERMIC

15-00680-00
15-00699-01 FORK,FINGER,150mm

15-00699-01
15-00700-00 PLATE, FORK BOTTOM 200MM WAFER

15-00700-00
15-00731-00 BUSHING, KEYED

15-00731-00
15-00742-00 TUBE,TC,CERAMIC

15-00742-00
15-032185-01 PIN WAFER CENTERING

15-032185-01
15-033947-00 COVER, PLATE, 200MM, SEMI, SPEED　

15-033947-00
15-052619-00 TONG,RING LIFE 200 MM

15-052619-00
15-053394-01 MINIMUM CONTACT AREA FORK 6"

15-053394-01
15-053394-02 MINIMUM CONTACT AREA FORK 8"

15-053394-02
15-054434-01 Excl RING MOER, 3mm edge exclusi

15-054434-01
15-10324-00 BUTTON, PIN

15-10324-00
15-127251-01 COVER PLATE

15-127251-01
15-169372-00 INSERT PADDLE 300MM VESPEL

15-169372-00
15-267616-00 CUP,TOP,KNIFE EDGE,TAPERED,300

15-267616-00
15-269129-00 CUP,300MM,KNIFE EDGE,BOTTOM,X40

15-269129-00
15-282814-00 CUP,TOP,1MM EE

15-282814-00
15-357896-00 CUP,BOTTOM,APC,1.75MM,PAI

15-357896-00
15-357957-00 CUP,BOTTON,APC,1MM,PAI

15-357957-00
16-00123-00 BELLOWS, WELDMENT

16-00123-00
16-286986-00 BELLOWS

16-286986-00
27-10127-00 GATE, VAT 1.21 W/PERFL-E

27-10127-00
GATE, VAT 1.21 W/PERFL-E
60-10312-00 GATE, VAT INSERT CASS W/ PERFL

60-10312-00
GATE, VAT INSERT CASS W/ PERFL
839-031766-001 VCR BELLOWS

839-031766-001 VCR BELLOWS
839-012255-001 INNER GATE BELLOWS

839-012255-001
INNER GATE BELLOWS
796-010692-002 BELLOWS

796-010692-002
790-008220-001 GATE DOOR

790-008220-001
GATE DOOR
716-801667-005 WINDOW QTZ

716-801667-005
716-443234-002 RING FOCUS QTZ HP PLUS

716-443234-002
716-330891-002 TCP Quartz Window

716-330891-002
716-330504-064 FOCUS RING

716-330504-064 FOCUS RING
716-038612-003 LAM PIN, PICK UP, DC BIAS

716-038612-003
716-031453-002 RING , FLR CHAMBER , ESC

716-031453-002 RING , FLR CHAMBER , ESC
716-030136-001 RING,FOC,6" ESC(EDGE RING)

716-030136-001 RING,FOC,6" ESC(EDGE RING)
716-030135-001 EDGE RING

716-030135-001
716-028722-161 BOTTOM CERAMIC CLAMP

716-028722-161
716-028688-268 CLAMP RING

716-028688-268
716-028668-264 PLT, WFR CLMP, DOM SHDW

716-028668-264
716-028414-018 FOCUS RING

716-028414-018
716-028414-016 FOCUS RING

716-028414-016
716-028251-161 CLAMP WAFER, Ceramic

716-028251-161
716-028028-004 RING ELECTRODE CLAMP 6" 12BOL

716-028028-004
716-027740-808 Quartz LSR Window

716-027740-808
716-027740-001 WDO，QTZ

716-027740-001
716-022030-004 SLV,QTZ,STEPPED,PIN,DC BIAS

716-022030-004
716-018614-081 FOCUS RING

716-018614-081
716-012639-024 NOZ,INJ,8X .055-45DEG RDL

716-012639-024
790-008220-002 DOOR,W/BONDED SEAL,SLOT VALVE,CHEMRAZ

790-008220-002
DOOR,W/BONDED SEAL,SLOT VALVE,CHEMRAZ
716-011923-001 CLAMP WAFER PLATE ATTACHMENT

716-011923-001
716-011564-001 ELECTRODE, UPPER, GRAPHITE, 6", LAM1,2

716-011564-001
716-011563-261 PLATE, WAFER CLAMP

716-011563-261
716-011540-001 RING FACE UPPER ELECTRODE

716-011540-001
716-011057-002 RING FILLER UPPER

716-011057-002
839-093786-001 BELLOWS, VAT V/V

839-093786-001
BELLOWS, VAT V/V
716-011009-001 WINDOW

716-011009-001
716-006721-001 RING,INSULATOR

716-006721-001
715-330984-001 RING GAS 9400

715-330984-001
715-028532-002 Ring,Cooling,8'Electro-static

715-028532-002
715-018991-206 Electrode,Aluminum.Anode 6"

715-018991-206
715-011985-006 CAP LOWER

715-011985-006
715-011913-080 LOWER BAFFLE

715-011913-080
715-011639-006 Cap, Electrode,thin edge semi 6"

715-011639-006
715-011531-015 UPPER ELECTRODE,ALUMINUM

715-011531-015
715-008220-105 DR,PLASMA,BARRIER,BMPR,ROOKER V,PM

715-008220-105
713-238718-002 Nozzle Tip,EBR,HD,PEM

713-238718-002
713-034965-001 PAD

713-034965-001
03-10411-00 SPRING T/C

03-10411-00
02-120403-00 THERMOCOUPLE SPRING LOADED 300MM

02-120403-00